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  • Patented 5x Ratio Drive™ system affords superior 10 nm XY resolution at 64 u-step/full step
  • Coincident rotation center out in front of stage enabling 90 degree setups
  • Patented inline actuators provide ease of access.
  • Small footprint allows multiple unit workstations.
  • External Stepping Motor Controllers for maximum performance and flexibility
  • Damped exterior shell design provides superior vibration and touch insensitivity.
  • Lightweight aluminum construction allows system to be moved easily by other motion equipment.
  • High mechanical stiffness affords rugged and stable base system.
  • Patented linear dual flexure Z offers frictionless repeatable straight travel.
  • Dual flexure Yaw and Pitch stages provide extreme resolution without arc error.


The following accessories are included:


  • Qty 2, X-MCC3 Universal 3-Axis drive controller
  • Qty 1, X-DC01 Data cable, 1 foot, for linking X-series controllers
  • Qty 1, PS14-48V37 Power supply, 48Vdc, 3.75 Amp output
  • Qty 1, U-DC06 6 ft. cable, USB, A-B, Black ROHS
  • Qty 1, 6 ft. cable, AC power (Region specific), black IEC320 - (shown as NEMA 5-15P)
  • Qty 2,  Actuator Cable Clamp (3 Cables), mounting bolts (Qty 4) for optical table (Metric or Imperial)


U6 Ultra XYZ/RYP Fully Automated Positioner (XY/10nm Z/50nm)

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