Patented 5x Ratio Drive™ system affords superior 10 nm XY resolution at 64 u-step/full step
Coincident rotation center out in front of stage enabling 90 degree setups
Patented inline actuators provide ease of access.

Small footprint allows multiple unit workstations.
External Stepping Motor Controllers for maximum performance and flexibility
Damped exterior shell design provides superior vibration and touch insensitivity.
Lightweight aluminum construction allows system to be moved easily by other motion equipment.
High mechanical stiffness affords rugged and stable base system.
Patented linear dual flexure Z offers frictionless repeatable straight travel.
Dual flexure Yaw and Pitch stages provide extreme resolution without arc error.

The following accessories are included: