- Coincident rotation center.
- Patented Inline actuators provide ease of access and multiple unit workstations.
- Patented 25x Ratio Drive™ system affords superior 10 nm XY resolution for far less cost.
- Small footprint allows multiple unit workstations.
- Onboard controller for actuators avoids high cost of separate motion controllers.
- Damped exterior shell design provides superior vibration and touch insensitivity.
- Lightweight aluminum construction allows system to be moved easily by other motion equipment.
- High mechanical stiffness affords rugged and stable base system.
- Patented linear dual flexure Z offers frictionless repeatable straight travel.
- Dual flexure Yaw and Pitch stages provide extreme resolution without arc error.
I5000 XYZ/YP Manual Positioner (XY/10nm Z/50nm)